| Challenge |
- Totally automate the manufacture of silicon wafers (first time
ever done).
- Replace a typically manual operation, allowing for the following:
- The fragile, delicate nature of the wafers
- Very high level of quality assurance required
- Severe environment during initial manufacture (dirt from band-sawing
of silicon billet, chips, soaking in high-temperature water to
separate wafers from binder).
- Ultra-clean environment for cleaning or etching.
|
| Solution |
|
- A custom automation system for the precision handling, soaking
and preparation, barcode tracking, inspection and reject handling
of silicon wafers.
- Complete information management and data sheet printing.
|
| Technologies Used |
- Staubli robot™
- Beam sensors for detecting cracks and chips
- ATS clean room conveyors
- Control software and local interface
- Information management software for lot tracking
- ATS Informatics PQMS Software
|
| Performance
Achieved |
- High throughput (450 wafers per hour)
|
|
