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Eco-Snow Systems Inc. Wins Follow On Orders From Triquint Semiconductor For Two WafercleanTM Co2 Metal Lift-Off Systems

September 11, 2000 | General
Livermore, California (September 11, 2000) Eco-Snow Systems, Inc. today announced it has been awarded orders from TriQuint Semiconductors, Inc. for two additional WaferCleanTM CO2 metal lift-off systems.

"We are very pleased to be further developing our relationship with a marketleading company like TriQuint, said Thomas Kosic, General Manager, Eco-Snow Systems, Inc. "These orders for a third and fourth WaferCleanTM system follow on the successful installation and commissioning of the first two systems that Eco-SnowTM supplied to TriQuint last February and August. The first two CO2 snow metal lift-off systems are now qualified for production on TriQuint's 4 and 6 inch wafer lines. These follow on orders are a clear market validation of the benefits our WaferCleanTM systems provide in increasing yield and reducing solvent usage in the production of semiconductor components."

The WaferCleanTM System is an "all-dry" solution that completely removes process residues without damage for metal lift-off applications and for cleaning after critical process steps such as CMP and etch in both semiconductor and compound semiconductor processes. The WaferCleanTM System uses Eco-SnowTM patented CO2 cleaning technology, which physically processes the wafer surface using a cryogenic aerosol of carbon dioxide particles. This new cleaning technology offers numerous advantages over conventional cleaning systems including superior performance, higher yields, reduced cycle times, and lower cost of ownership. WaferCleanTM Systems are fast, environmentally friendly, non-contact process systems that can be implemented as an innovative alternative to conventional wet processing or as a value-added process step to improve manufacturing yields and reduce solvent usage. The WaferCleanTM System is CE marked, has a footprint of 50" x 79" x 52", and can be bulkhead mounted.

Eco-Snow Systems, Inc. develops and sells CO2 based precision cleaning systems for use in the manufacturing and processing of gallium arsenide, semiconductor, and thin film devices. Eco-SnowTM is also currently developing, with the Department of Defense, precision cleaning systems for use in space utilizing Eco-Snow's CO2 technology.

Eco-Snow Systems, Inc. is a subsidiary of ATS Automation Tooling Systems Inc., the industry's leading designer and producer of turn-key automated manufacturing and test systems, which are used primarily by multinational corporations operating in a variety of industries including: automotive, computer/electronics, healthcare, and other emerging markets. ATS also makes precision components and sub-assemblies using its own custom-built manufacturing systems, process
knowledge and automation technology. ATS employs approximately 3,200 people at 24 facilities in Canada, the United States, Europe and Asia-Pacific. The Company's shares are traded on The Toronto Stock Exchange under the symbol ATA.

Certain forward-looking statements are made in this news release, including statements regarding possible future business. Investors are cautioned that such forward-looking statements involve risks and uncertainties, including, without limitation, continued acceptance of ATS' products, technologies, customer requirements and other risks detailed from time to time in ATS' periodic reports filed with Canadian regulatory authorities.